A novel vertical comb-drive electrostatic actuator using a one layer process

Author: Hailu Zewdu   He Siyuan   Mrad Ridha Ben  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115016-115026

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