Fabrication of nanoplate resonating structures via micro-masonry

Author： Bhaswara A Keum H Rhee S Legrand B Mathieu F Kim S Nicu L Leichle T

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115012-115019

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