Analysis of structural defects in boron-implanted silicon single crystals on the basis of the results of double-and triple-crystal x-ray diffractometry

Author： Petrakov A.   Tikhonov N.   Shilov S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.43, Iss.6, 1998-06, pp. : 696-700

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