Investigation of implanted layers in silicon carbide by a modulation photoreflection method

Author： Walther H.   Karge H.   Muratikov K.   Suvorov A.   Usov I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.23, Iss.7, 1997-07, pp. : 500-503

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