X-ray irradiation at subthreshold energies modifies the surface micromorphology of epitaxial silicon layers on sapphire

Author: Kiselev A.   Perevoshchikov V.   Skupov V.   Filatov D.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.27, Iss.9, 2001-09, pp. : 725-727

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