SIMS profiling of GaAs/δ-AlAs/GaAs/… heterostructures using polyatomic ionized oxygen clusters

Author： Ber B.   Kovarsky A.   Kazantsev D.   Trushin Yu.   Zhurkin E.   Schmidt A.   Belykh S.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.30, Iss.10, 2004-10, pp. : 836-838

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