Formation and use of positioning marks in scanning probe microscopy

Author: Lozovskii V.   Chebotarev S.   Irkha V.   Valov G.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.36, Iss.8, 2010-08, pp. : 737-738

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