Analysis and control of micro-cantilever in dynamic mode AFM

Author： Korayem Moharam   Zafari S.   Amanati A.   Damircheli M.   Ebrahimi N.  

Publisher： Springer Publishing Company

ISSN： 0268-3768

Source： The International Journal of Advanced Manufacturing Technology, Vol.50, Iss.9-12, 2010-10, pp. : 979-990

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