The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons

Author: Hecimovic A   Böke M   Winter J  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.10, 2014-03, pp. : 102003-102007

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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