Fabrication of Micro-Grooves in Silicon Carbide Using Femtosecond Laser Irradiation and Acid Etching

Author： Vanthanh Khuat   Yun-Can Ma   Jin-Hai Si   Tao Chen   Feng Chen   Xun Hou  

Publisher： IOP Publishing

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.31, Iss.3, 2014-03, pp. : 37901-37904

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Fabrication of Through Micro-hole Arrays in Silicon Using Femtosecond Laser Irradiation and Selective Chemical Etching

By Bo Gao   Tao Chen   Ying Chen   Jin-Hai Si   Xun Hou  

Chinese Physics Letters, Vol. 32, Iss. 10, 2015-10 ,pp. : 107901-107904

IOP Publishing

Access to resources Recommend Favorite

Femtosecond Laser 3D Fabrication in Porous Glass for Micro- and Nanofluidic Applications

By Liao Yang   Cheng Ya  

Micromachines, Vol. 5, Iss. 4, 2014-11 ,pp. : 1106-1134

MDPI

Access to resources Recommend Favorite

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

By Ahmmed K. M. Tanvir   Grambow Colin   Kietzig Anne-Marie  

Micromachines, Vol. 5, Iss. 4, 2014-11 ,pp. : 1219-1253

MDPI

Access to resources Recommend Favorite

Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching

By Venturini Francesco   Sansotera Maurizio   Martinez Vazquez Rebeca   Osellame Roberto   Cerullo Giulio   Navarrini Walter  

Micromachines, Vol. 3, Iss. 4, 2012-09 ,pp. : 604-614

MDPI

Access to resources Recommend Favorite

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

By Tielen Viktor   Bellouard Yves  

Micromachines, Vol. 5, Iss. 3, 2014-09 ,pp. : 697-710

MDPI

Access to resources Recommend Favorite