Analytical procedure for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy

Author： Fujita Takaya   Matsumura Koji   Itoh Hiroshi   Fujita Daisuke  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44021-44027

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