Scanning tunneling microscopy-based in situ measurement of fast tool servo-assisted diamond turning micro-structures

Author: Ju Bing-Feng   Zhu Wu-Le   Yang Shunyao   Yang Keji  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.5, 2014-05, pp. : 55004-55014

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