Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator

Author: Riazanova A V   Costanzi B N   Aristov A   Rikers Y G M   Ström V   Mulders J J L   Kabashin A V   Dahlberg E Dan   Belova L M  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.15, 2014-04, pp. : 155301-155307

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