Bulk micro-machined wide-band aero-acoustic microphone and its application to acoustic ranging

Author： Zhou Z J   Rufer L   Salze E   Yuldashev P   Ollivier S   Wong M  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105006-105015

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