Author: Heidrich N Iankov D Hees J Pletschen W Sah R E Kirste L Zuerbig V Nebel C Ambacher O Lebedev V
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125017-125022
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