Author: Tomimatsu Yutaka Takahashi Hidetoshi Kobayashi Takeshi Matsumoto Kiyoshi Shimoyama Isao Itoh Toshihiro Maeda Ryutaro
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125023-125029
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