A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch

Author: Tomimatsu Yutaka   Takahashi Hidetoshi   Kobayashi Takeshi   Matsumoto Kiyoshi   Shimoyama Isao   Itoh Toshihiro   Maeda Ryutaro  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125023-125029

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