Micromanipulation transfer of membrane resonators for circuit optomechanics

Author: Berdova Maria     Pirkkalainen Juha-Matti   Sulkko Jaakko   Song Xuefeng   Hakonen Pertti J   Sillanpää Mika A  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125024-125028

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