Author: Goldowsky J Mastrangeli M Jacot-Descombes L Gullo M R Mermoud G Brugger J Martinoli A Nelson B J Knapp Helmut F
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125026-125036
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