Author: Yong Jiale Yang Qing Chen Feng Zhang Dongshi Du Guangqing Si Jinhai Yun Feng Hou Xun
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35006-35013
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