Development of UV-assisted ozone steam etching and investigation of its usability for SU-8 removal

Author: Yoshida Shinya   Esashi Masayoshi   Tanaka Shuji  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35007-35015

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