Author: Yoshida Shinya Esashi Masayoshi Tanaka Shuji
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35007-35015
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Innovative SU-8 Lithography Techniques and Their Applications
By Lee Jeong Bong Choi Kyung-Hak Yoo Koangki
Micromachines, Vol. 6, Iss. 1, 2014-12 ,pp. :