Fabrication of SU-8 moulds on glass substrates by using a common thin negative photoresist as an adhesive layer

Author: Liu Junshan   Song Dongfang   Zong Guoge   Yin Penghe   Zhang Xiaolei   Xu Zheng   Du Liqun   Liu Chong   Wang Liding  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35009-35013

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