Author: Liu Junshan Song Dongfang Zong Guoge Yin Penghe Zhang Xiaolei Xu Zheng Du Liqun Liu Chong Wang Liding
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35009-35013
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.