Doped polycrystalline 3C–SiC films with low stress for MEMS: part I. Deposition conditions and film properties

Author: Mehregany Mehran   Zorman Christian A   Fu Xiao-An   Trevino Jacob  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35013-35019

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