Infrared emitting nanostructures for highly efficient microhotplates

Author: Müller L   Käpplinger I   Biermann S   Brode W   Hoffmann Martin  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35014-35022

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