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Author: Brookhuis R A Droogendijk H de Boer M J Sanders R G P Lammerink T S J Wiegerink R J Krijnen G J M
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35015-35024
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