Nonlinear control of an electromagnetic polymer MEMS hard-magnetic micromirror and its imaging application

Author： Chen H   Pallapa M   Sun W J   Sun Z D   Yeow J T W  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45004-45012

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