Precise extension-mode resonant sensor with uniform and repeatable sensitivity for detection of ppm-level ammonia

Author： Yu Feng   Yu Haitao   Xu Pengcheng   Li Xinxin  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45005-45012

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