Author: Liang Xiong Wu Xiaoyu Zeng Kun Xu Bin Wu Shiyun Zhao Hang Li Bing Ruan Shuangchen
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45014-45023
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