Author: Yang Yongliang Cui Yong-Tao Haemmerli Alexandre Lai Keji Kundhikanjana Worasom Harjee Nahid Pruitt Beth L Kelly Michael Shen Zhi-Xun
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45026-45032
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