Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging

Author: Yang Yongliang     Cui Yong-Tao   Haemmerli Alexandre   Lai Keji   Kundhikanjana Worasom   Harjee Nahid   Pruitt Beth L   Kelly Michael   Shen Zhi-Xun  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45026-45032

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