Author: Yang Hyun-Ho Han Chang-Hoon Yoon Jun-Bo
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65012-65019
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Wei Wei Gu Zhaolin Wang Sheng Zhang Yunwei Lei Kangbin Kase Kiwamu
Journal of Micromechanics and Microengineering, Vol. 23, Iss. 1, 2013-01 ,pp. :