Electrostatic micro-actuator with a pre-charged series capacitor: modeling, design, and demonstration

Author: Yang Hyun-Ho   Han Chang-Hoon     Yoon Jun-Bo  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65012-65019

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