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Author: Yang Tao Bellouard Yves
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|10|105009-105016
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105009-105016
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Abstract
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