Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

Author： Yang Tao   Bellouard Yves  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|10|105009-105016

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105009-105016

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