A gyroscope fabrication method for high sensitivity and robustness to fabrication tolerances

Author: Sung Jungwoo     Seok Seyeong   Kwon Hyuckjin J   Kim Minseo   Kim Geonhwee   Lim Geunbae  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75013-75019

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