Author: Sung Jungwoo Seok Seyeong Kwon Hyuckjin J Kim Minseo Kim Geonhwee Lim Geunbae
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75013-75019
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