Author: Jacq S Cardinaud C Brizoual L Le Granier A
Publisher: IOP Publishing
ISSN: 0963-0252
Source: Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55004-55012
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Electron heating during E-H transition in inductively coupled RF plasmas
Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. :
Plasma Sources Science and Technology, Vol. 22, Iss. 6, 2013-12 ,pp. :