Optical emission spectroscopy of plasma generated by a waveguide-supplied microwave plasma source operated at 915 MHz

Author: Miotk Robert   Jasinski Mariusz   Mizeraczyk Jerzy  

Publisher: IOP Publishing

ISSN: 1402-4896

Source: Physica Scripta, Vol.2014, Iss.161, 2014-05, pp. : 14055-14059

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