Oxidation and nitridation of niobium films by rapid thermal processing

Author: Matylitskaya Volha A.   Bock Wolfgang   Thoma Klaus   Kolbesen Bernd O.  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.156, Iss.1-2, 2006-11, pp. : 33-37

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