Transition interface for improving the temperature characteristics of micromachined gyroscopes

Author: Hou Zhanqiang   Wu Xuezhong   Xiao Dingbang   Chen Zhihua   Su Jianbin  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 227-234

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