Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives

Author： Rola Krzysztof   Ptasiński Konrad   Zakrzewski Adrian   Zubel Irena  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 221-226

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