Preparation of sacrificial layer for MEMS devices by lift-off technology

Author: Yang Jie   Shi Yu   Zhong Hui   Jiao Xiangquan   Zhang Rui   Du Bo  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 259-263

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next