A novel self-aligned electrostatic vertical actuator using plastic deformation technology

Author： Li Wei   Song Zhaohui   Ge Xiaohong   Che Lufeng   Wang Yuelin  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 251-257

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