Effects of in situ annealing on the properties of Al-doped ZnO thin films deposited by RF magnetron sputtering

Author: Kim Deok-Kyu   Park Choon-Bae  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.25, Iss.4, 2014-04, pp. : 1589-1595

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