Identification of hydrogen related defects in proton implanted float-zone silicon

Author： Lévêque P.   A Hallén B. G.   Svensson J.   Wong-Leung C.   Jagadish V.   Privitera P.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|23|1|5-9

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.23, Iss.1, 2002-11, pp. : 5-9

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