Integrated cooling devices in silicon technology

Author: Perret C.   Avenas Y.   Gillot Ch.   Boussey J.   Schaeffer Ch.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|18|2|115-123

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.18, Iss.2, 2010-03, pp. : 115-123

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Abstract