Characteristics of deposited Eu2O3 film as a thick gate dielectric for silicon

Author: Dakhel A. A.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|28|1|59-64

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.28, Iss.1, 2004-08, pp. : 59-64

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Abstract