Microscale friction investigation of polysilicon surface using scanning force microscopy

Author： Flueraru C.   Cobianu C.   Dascalu D.   Flueraru M.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|3|1|29-33

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.3, Iss.1, 2010-03, pp. : 29-33

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