Two-dimensional modelling of CH4-H2 radio-frequency discharges for a-C:H deposition

Author: Leroy O.   Videlot H.   Jolly J.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|16|2|121-130

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.16, Iss.2, 2010-03, pp. : 121-130

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Abstract