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Depth profiling and morphological characterization of AlN thin films deposited on Si substrates using a reactive sputter magnetron

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Effect of the hydrogen dilution on the local microstructure in hydrogenated amorphous silicon films deposited by radiofrequency magnetron sputtering

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Effects of substrates on the crystal structure, texturing and optical properties of AlN coatings deposited by inverted cylindrical magnetron sputtering

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