Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry

Author： Foldyna M.   De Martino A.   Garcia-Caurel E.   Ossikovski R.   Licitra C.   Bertin F.   Postava K.   Drevillon B.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|42|3|351-359

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.42, Iss.3, 2008-06, pp. : 351-359

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