Defect imaging in ultra-thin SiGe (100) strain relaxed buffers

Author: Werner J.   Lyutovich K.   Parry C. P.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|367-370

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2011-02, pp. : 367-370

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Abstract