Investigation of silicon oxynitride and amorphous silicon multilayers

Author： Serenyi M.   Frigeri C.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|329-332

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 329-332

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