Mesoscale MEMS motion transformer and amplifier electrostatically actuated by parallel plate electrodes

Author： Gerson Y   Nachmias T   Maimon R   Krylov S  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|5|55006-55015

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55006-55015

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