A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|12|125029-125036

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125029-125036

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